JPS627292Y2 - - Google Patents

Info

Publication number
JPS627292Y2
JPS627292Y2 JP1980065629U JP6562980U JPS627292Y2 JP S627292 Y2 JPS627292 Y2 JP S627292Y2 JP 1980065629 U JP1980065629 U JP 1980065629U JP 6562980 U JP6562980 U JP 6562980U JP S627292 Y2 JPS627292 Y2 JP S627292Y2
Authority
JP
Japan
Prior art keywords
optical system
projection optical
slit
axis
illumination device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980065629U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56167309U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980065629U priority Critical patent/JPS627292Y2/ja
Publication of JPS56167309U publication Critical patent/JPS56167309U/ja
Application granted granted Critical
Publication of JPS627292Y2 publication Critical patent/JPS627292Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
JP1980065629U 1980-05-15 1980-05-15 Expired JPS627292Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980065629U JPS627292Y2 (en]) 1980-05-15 1980-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980065629U JPS627292Y2 (en]) 1980-05-15 1980-05-15

Publications (2)

Publication Number Publication Date
JPS56167309U JPS56167309U (en]) 1981-12-11
JPS627292Y2 true JPS627292Y2 (en]) 1987-02-20

Family

ID=29659755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980065629U Expired JPS627292Y2 (en]) 1980-05-15 1980-05-15

Country Status (1)

Country Link
JP (1) JPS627292Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5119856B2 (en]) * 1972-08-30 1976-06-21

Also Published As

Publication number Publication date
JPS56167309U (en]) 1981-12-11

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